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High‐performance bulk silicon interdigital capacitive ...

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Conclusion: In this work, a highperformance bulk silicon interdigital capacitive temperature sensor based on GO has been designed and fabricated. The bulk silicon temperature sensor was composed of the bulk silicon interdigital electrodes and the GO sensing material. Compared with typical CMOS integrated temperature sensors, the sensitivity of

Transistors based on twodimensional materials for future ...

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· Fieldeffect transistors based on twodimensional (2D) materials have the potential to be used in very largescale integration (VLSI) technology, but whether they can be …

Highly Sensitive Bulk Silicon Chemical Sensors with Sub5 ...

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producible, lowpower gas sensors in a wide variety of industrial and consumer applications. Here, we report chemicalsensitive fieldeffecttransistors (CSFETs) based on bulk silicon wafers, wherein an electrostatically confined sub5 nm thin charge inversion layer is modulated by chemical exposure to achieve a highsensitivity gassensing ...

What are Semiconductor Sensors?

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· Gas Sensors Semiconductor gas sensors convert changes in physicochemical properties into electric current signals, which are picked up by the sensing device. These have good sensitivity, respond rapidly, are stable over the long term and can be integrated into devices for gas sensing.

Activematrix monolithic gas sensor array based on MoS2 ...

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· The demonstrated activematrix gas sensor arrays ... Fahad, H. M. et al. Room temperature multiplexed gas sensing using chemicalsensitive …

DualMode Gas Sensor Composed of a Silicon Nanoribbon ...

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DualMode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons. Publication Type: Journal Article: Google Scholar; Department of Psychology 106B Kastle Hall University of Kentucky Lexington, KY 405060044 Tel: 8592579640 Fax: 8593231979

Silicon gas flow sensors using industrial CMOS and bipolar ...

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· We report two silicon gas flow sensors fabricated by combining silicon micromachining with either standard CMOS or standard bipolar technology. Both sensors are based on the Seebeck effect. An integrated thermopile is placed on a freestanding cantilever beam and measures the temperature difference between the heated tip of the beam and the bulk silicon, which depends on …

Highly Sensitive Bulk Silicon Chemical Sensors with Sub5 ...

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Highly Sensitive Bulk Silicon Chemical Sensors with Sub5 Nanometer Thin Charge Inversion Layers Hossain M. Fahad,1,2,3† Niharika Gupta,1† Rui Han,1 Sujay B. Desai,1,2,3 Ali Javey1,2,3* 1 Electrical Engineering Computer Sciences, University of California, Berkeley, CA 94720,

Highly Sensitive Bulk Silicon Chemical Sensors with Sub5 ...

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Highly Sensitive Bulk Silicon Chemical Sensors with Sub5 Nanometer Thin Charge Inversion Layers Hossain M. Fahad,1,2,3† Niharika Gupta,1† Rui Han,1 Sujay B. Desai,1,2,3 Ali Javey1,2,3* 1 Electrical Engineering Computer Sciences, University of …

Highly Sensitive Bulk Silicon Chemical Sensors with Sub5 ...

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There is an increasing demand for massproducible, lowpower gas sensors in a wide variety of industrial and consumer applications. Here, we report chemicalsensitive fieldeffecttransistors (CSFETs) based on bulk silicon wafers, wherein an electrostatically confined sub5 nm thin charge inversion layer is modulated by chemical exposure to achieve a highsensitivity gas …

VOC Detection Using Multimode Enose Composed of Bulk ...

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multimode sensing of vapors have been made with remarkable results [5, 6]. Here we combine film bulk acoustic resonator (FBAR) with Silicon nanowire field effect transistor (SiNWFET) to construct electronic nose in analyzing VOCs. Based on gravimetric detection, the response of FBAR is related with the concentration of VOCs since the absorbed

WO2019133748A1 Inversion layer gas sensors using bulk ...

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A gas sensor and methods for producing the same are disclosed. The gas sensor of the present disclosure includes a bulk silicon layer, comprising a controllable inversion layer, an oxide layer on top of the bulk silicon layer, wherein the controllable inversion layer is located at an interface of the bulk silicon layer and the oxide layer, and a sensing layer on the oxide layer, wherein …

INVERSION LAYER GAS SENSORS USING BULK SILICON CHEMICAL ...

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A gas sensor and methods for producing the same are disclosed. The gas sensor of the present disclosure includes a bulk silicon layer, comprising a controllable inversion layer, an oxide layer on top of the bulk silicon layer, wherein the controllable inversion layer is located at an interface of the bulk silicon layer and the oxide layer, and a sensing layer on the oxide layer, wherein …

(PDF) Room temperature multiplexed gas sensing using ...

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Room temperature multiplexed gas sensing using chemicalsensitive silicon transistors. March ... of gas sensors ... a part of the silicon on insulator (SOI) or the bulk ...

MEMSbased electrochemical gas sensors and waferlevel methods

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electrochemical gas sensors and methods of fabrication. This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. Handling of a thin silicon wafer is an important issue in …

Effect of Functional Groups on the Sensing Properties of ...

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DualMode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons. Sensors 2018 , 18 (2) , 343.

INVERSION LAYER GAS SENSORS USING BULK SILICON …

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A gas sensor and methods for producing the same are disclosed. The gas sensor of the present disclosure includes a bulk silicon layer, comprising a controllable inversion layer, an oxide layer on top of the bulk silicon layer, wherein the controllable inversion layer is located at an interface of the bulk silicon layer and the oxide layer, and a sensing layer on the oxide layer, wherein …

[PDF] Highly Sensitive Bulk Silicon Chemical Sensors with ...

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There is an increasing demand for massproducible, lowpower gas sensors in a wide variety of industrial and consumer applications. Here, we report chemicalsensitive fieldeffecttransistors (CSFETs) based on bulk silicon wafers, wherein an electrostatically confined sub5 nm thin charge inversion layer is modulated by chemical exposure to achieve a highsensitivity gas …

A Comparative Study of the Gas Sensing Behavior in P3HT ...

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· 1. Introduction. Organic thin film transistors (OTFTs) have attracted increasing attention due to their wide variety of potential sensing applications, such as environmental monitoring [1–4], food industry and medical diagnostics [5,6].Multiple parameters, such as mobility, threshold voltage and bulk conductivity, can be used for recognition/sensing of analyte molecules [].

[PDF] Highly Sensitive Bulk Silicon Chemical Sensors with ...

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There is an increasing demand for massproducible, lowpower gas sensors in a wide variety of industrial and consumer applications. Here, we report chemicalsensitive fieldeffecttransistors (CSFETs) based on bulk silicon wafers, wherein an electrostatically confined sub5 nm thin charge inversion layer is modulated by chemical exposure to achieve a highsensitivity gassensing platform.

Gas Sensor an overview | ScienceDirect Topics

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Gas Sensor. Gas sensors are devices that can detect the presence and concentration of various hazardous gases and vapors, such as toxic or explosive gases, volatile organic compounds (VOCs), humidity, and odors [1]. From: Sensors and Actuators B: Chemical, 2018.

INVERSION LAYER GAS SENSORS USING BULK SILICON CHEMICAL ...

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Complete Patent Searching Database and Patent Data Analytics Services.

Phthalocyaninebased fieldeffect transistors as gas sensors

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· In this review molecular fieldeffect transistors are described and compared with their gatemodified inorganic counterparts. The different processes involved in gas sensing are summarized. The advantages of transistors on resistors are demonstrated. The sensitivity of molecular fieldeffect transistors to strong oxidizing species, for example ozone, is detailed …

INVERSION LAYER GAS SENSORS USING BULK SILICON …

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A gas sensor and methods for producing the same are disclosed. The gas sensor of the present disclosure includes a bulk silicon layer, comprising a controllable inversion layer, an oxide layer on top of the bulk silicon layer, wherein the controllable inversion layer is located at an interface of the bulk silicon layer and the oxide layer, and a sensing layer on the oxide layer, wherein a ...

INVERSION LAYER GAS SENSORS USING BULK SILICON CHEMICAL ...

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FAHAD ET AL.: "Room temperature multiplexed gas sensing using chemicalsensitive silicon transistors", APPLIED SCIENCES AND ENGINEERING, SCIENCE ADVANCES, 24 March 2017 (20170324), pages 1 8, XP055623350, Retrieved from the Internet [retrieved on 20190220] FAHAD ET AL.: "Highly Sensitive Bulk Silicon Chemical Sensors with Sub5 nm …

DualMode Gas Sensor Composed of a Silicon Nanoribbon ...

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sensors Article DualMode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons

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